发明公开
EP1831429A4 METHODS AND APPARATUS FOR SEQUENTIALLY ALTERNATING AMONG PLASMA PROCESSES IN ORDER TO OPTIMIZE A SUBSTRATE
审中-公开
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基本信息:
- 专利标题: METHODS AND APPARATUS FOR SEQUENTIALLY ALTERNATING AMONG PLASMA PROCESSES IN ORDER TO OPTIMIZE A SUBSTRATE
- 专利标题(中):用于等离子体的连续变化的方法和设备流程优化衬底
- 申请号:EP05854442 申请日:2005-12-16
- 公开(公告)号:EP1831429A4 公开(公告)日:2008-10-22
- 发明人: KIERMASZ ADRIAN , PANDHUMSOPORN TAMARAK , COFER ALFRED
- 申请人: LAM RES CORP
- 专利权人: LAM RES CORP
- 当前专利权人: LAM RES CORP
- 优先权: US2298304 2004-12-22
- 主分类号: C23F4/00
- IPC分类号: C23F4/00 ; C23C14/02 ; C23C16/02
摘要:
In plasma processing system, a method for optimizing etching of a substrate is disclosed. The method includes selecting a first plasma process recipe including a first process variable, wherein changing the first process variable by a first amount optimizes a first substrate etch characteristic and aggravates a second substrate etch characteristic. The method also includes selecting second plasma process recipe including a second process variable, wherein changing the second process variable by a second amount aggravates the fist substrate etch characteristic and optimizes the second substrate etch characteristic. The method further includes positioning a substrate on a chuck in a plasma processing chamber; and striking a plasma within the plasma processing chamber. The method also includes alternating between the first plasma recipe and the second plasma recipe, wherein upon completion of the alternating, the first substrate etch characteristic and the second substrate etch characteristic are substantially optimized.