基本信息:
- 专利标题： CARBON NANOTUBE AGGREGATE AND PROCESS FOR PRODUCING THE SAME
- 专利标题（中）：碳纳米管单位及其制造方法
- 申请号：EP05803959.5 申请日：2005-11-10
- 公开(公告)号：EP1810950B1 公开(公告)日：2016-01-20
- 发明人： TAKI, Yusuke , SHINOHARA, Kiyoaki
- 申请人： Nikon Corporation
- 申请人地址： 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 JP
- 专利权人： Nikon Corporation
- 当前专利权人： NIKON CORPORATION
- 当前专利权人地址： NIKON CORPORATION
- 代理机构： Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte
- 优先权： JP2004326593 20041110
- 国际公布： WO2006052009 20060518
- 主分类号： C01B31/02
- IPC分类号： C01B31/02 ; H01J1/304 ; H01J9/02
摘要：
A method for manufacturing a carbon nanotube assembly including the steps of: forming metallic fine particles, having a predetermined particle diameter, on a substrate; heating the metallic fine particles to a predetermined temperature of 300°C to 400°C in a reducing atmosphere to cause reduction at surfaces thereof; heating the metallic fine particles to a predetermined reaction temperature in a reactor; and introducing an organic compound vapor into the reactor to grow carbon nanotubes on the metallic fine particles in such a way that a time during which the temperature of the metallic fine particles exceeds 450°C is 600 seconds or fewer for the period of time before the growth of the carbon nanotubes is started after the heating of the metallic fine particles is started.
公开/授权文献:
- EP1810950A1 CARBON NANOTUBE AGGREGATE AND PROCESS FOR PRODUCING THE SAME 公开/授权日：2007-07-25