基本信息:
- 专利标题： A PARTICLE BEAM GENERATOR
- 专利标题（中）：设备生产带电粒子
- 申请号：EP03760078.0 申请日：2003-06-16
- 公开(公告)号：EP1532649A2 公开(公告)日：2005-05-25
- 发明人： Eastham, Derek Anthony
- 申请人： NFAB Limited
- 申请人地址： Optic Technium,Ffordd William Morgan,St Asaph Business Park,St Asaph Denbighshire LL17 0JD GB
- 专利权人： NFAB Limited
- 当前专利权人： NFAB Limited
- 当前专利权人地址： Optic Technium,Ffordd William Morgan,St Asaph Business Park,St Asaph Denbighshire LL17 0JD GB
- 代理机构： Hammersley, John
- 优先权： GB0213772 20020615; GB0219818 20020824; GB0300265 20030107; GB0302591 20030205; GB0303402 20030214
- 国际公布： WO2003107375 20031224
- 主分类号： H01J37/26
- IPC分类号： H01J37/26 ; H01J37/317
摘要：
The source of electrons is a nanotip in a vacuum as used in near field microscopy. The source of ions is a similar nanotip in vacuum supplied with liquid metal (gallium) as in a liquid-metal ion source. Electrons or ions from this nanometre-sized tip are extracted by centralising the tip over an aperture plate and applying a suitable voltage to the tip. The electrons (ions) pass through this plate and are accelerated up to several keV using a nanoscale/microscale accelerating column before being focussed using further microscale (or nanoscale) cylindrical lenses. The final element is an aberration corrected miniature (or sub-miniature) einzel lens which can focus the beam at several millimetres from the end of the instrument.
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/26 | .电子或离子显微镜；电子或离子衍射管 |