基本信息:
- 专利标题： RUNDLÄUFERMASCHINE FÜR CVD-BESCHICHTUNGEN
- 专利标题（英）：Rotary machine for cvd coatings
- 专利标题（中）：旋转式机CVD涂层
- 申请号：EP03755134.8 申请日：2003-05-26
- 公开(公告)号：EP1507895B1 公开(公告)日：2010-07-21
- 发明人： BEHLE, Stephan , LÜTTRINGHAUS-HENKEL, Andreas , ARNOLD, Gregor , BICKER, Matthias , KLEIN, Jürgen
- 申请人： Schott AG
- 申请人地址： Hattenbergstrasse 10 55122 Mainz DE
- 专利权人： Schott AG
- 当前专利权人： Schott AG
- 当前专利权人地址： Hattenbergstrasse 10 55122 Mainz DE
- 代理机构： Herden, Andreas F.
- 优先权： DE10223288 20020524; DE10224395 20020601; DE10225607 20020607; DE10225985 20020611; DE10253512 20021116; DE10253513 20021116
- 国际公布： WO2003100129 20031204
- 主分类号： C23C16/54
- IPC分类号： C23C16/54 ; C23C16/04
摘要：
The aim of the invention is to allow workpieces to be coated in a particularly effective and fast manner by means of chemical vapor deposition (CVD). Said aim is achieved by the inventive rotary device (1) for treating, particularly CVD coating, workpieces, which comprises a conveying carousel (3), treatment stations (51, 52,…, 5N) that are conveyed by means of the carousel, and at least one first pumping device (71 - 74) that is also conveyed by means of the carousel (3).
公开/授权文献:
- EP1507895A1 RUNDL UFERMASCHINE F R CVD-BESCHICHTUNGEN 公开/授权日：2005-02-23