A phased array antenna (100) comprising a planar array having a plurality of modules (101,102,103). Each module comprises an integrated multilayer structure having a plurality of radiating elements (215), at least one of the layers is produced using MEMS technology. Further, each module has at least one of a plurality of phase shifters (220,221,222), a plurality of power dividers (230,231,232), a plurality of polarization circuits (and a plurality of filters(240,241,242)). The modules are coupled, both mechanically and electrically, to a distribution network (110) for distribution of DC signals and RF signals. At least one amplifier (121,122,123) is connected between the distribution network and the modules or a single amplifier is connected to the whole array.