发明公开
EP1291064A3 Air filter, method of manufacturing air filter, local facility, clean room, treating agent, and method of manufacturing filter medium
失效
基本信息:
- 专利标题： Air filter, method of manufacturing air filter, local facility, clean room, treating agent, and method of manufacturing filter medium
- 专利标题（中）：空气过滤器，空气过滤器，本地系统中，洁净室设备，治疗和制造过滤介质的方法的制备方法中
- 申请号：EP02027663.0 申请日：1996-07-25
- 公开(公告)号：EP1291064A3 公开(公告)日：2004-01-07
- 发明人： Kobayashi, Sadao, Taisei Corporation , Imafuku, Massayuki, Taisei Corporation , Wakayama, Yoshihide, Taisei Corporation
- 申请人： TAISEI CORPORATION
- 申请人地址： 25-1, Nishi-Shinjuku 1-chome Shinjuku-ku, Tokyo 163 JP
- 专利权人： TAISEI CORPORATION
- 当前专利权人： TAISEI CORPORATION
- 当前专利权人地址： 25-1, Nishi-Shinjuku 1-chome Shinjuku-ku, Tokyo 163 JP
- 代理机构： Sparing - Röhl - Henseler Patentanwälte
- 优先权： JP19209095 19950727
- 主分类号： B01D46/10
- IPC分类号： B01D46/10 ; B01D39/14
摘要：
A material not releasing gaseous organic substances during use is used as a filter medium and a sealing material for tightly sealing between the medium and a frame. Specifically, a synthetic paraffin not containing an aliphatic hydrocarbon having not more than 19 carbon atoms or less is used as a non-silicone type water repellent contained in a treatment agent for forming fibers into a cloth-like filter medium. A carboxylic acid ester having 400 or more molecular weight is used as a plasticizer and a phenolic compound having 300 or more molecular weight is used as an antioxidant to be added to the treatment agent and the sealing material. This enables that the gaseous organic substances are not present in a clean room, a semiconductor production apparatus or the like. Further, if the filter medium and the sealing material are formed of a material not releasing organic phosphorus compounds and boron compounds in the air, a clean room and a local facility particularly suitable for use in the production of semiconductors are provided.
摘要（中）：
在使用过程中不释放气态有机物质的材料被用作过滤介质和用于所述介质和框架之间紧密地密封的密封材料。 具体而言，合成石蜡不含有具有不超过19个碳原子或更少的脂族烃的被用作包含在治疗剂用于形成纤维成布状的过滤介质的非硅氧烷型防水。 具有400或更多的分子量的羧酸酯作为增塑剂，并且具有300或更高的分子量被用作抗氧化剂被添加到所述处理剂和密封材料的酚类化合物。 这使得能够确实气态有机物质中不存在在一个干净的房间里，半导体制造装置等。 此外，如果过滤器滤材和密封材料形成的材料不释放有机磷化合物和硼化合物在空气中，提供了一个干净的房间和一个本地设备特别适合于半导体生产中的用途。
公开/授权文献:
IPC结构图谱:
| B | 作业；运输 |
| --B01 | 一般的物理或化学的方法或装置 |
| ----B01D | 分离 |
| ------B01D46/00 | 专门用于把弥散粒子从气体或蒸气中分离出来的经过改进的过滤器和过滤方法 |
| --------B01D46/10 | .采用具有平表面的滤板、滤片或滤垫的粒子分离器，如聚尘器 |