
基本信息:
- 专利标题: MICROMACHINED RATE AND ACCELERATION SENSOR.
- 专利标题(中):传感器,用于测量加速和微处理速度。
- 申请号:EP92906950 申请日:1992-02-04
- 公开(公告)号:EP0570521A4 公开(公告)日:1995-01-11
- 发明人: HULSING RAND H II
- 申请人: SUNDSTRAND CORP
- 专利权人: SUNDSTRAND CORP
- 当前专利权人: ALLIEDSIGNAL INC.
- 当前专利权人地址: ALLIEDSIGNAL INC.
- 优先权: US65353391 1991-02-08
- 主分类号: F02G1/044
- IPC分类号: F02G1/044 ; F16L37/24 ; G01C19/5719 ; G01C19/5747 ; G01P15/08 ; G01P15/097 ; G01P15/10 ; G01P15/18 ; G01P9/04
摘要:
A sensor (10) is disclosed for measuring the specific force and angular rotation rate of a moving body and is micromachined from a silicon substrate (16). First and second accelerometers (32a and b) are micromachined from the silicon substrate (16), each having a force sensing axis (38) and producing an output signal of the acceleration of the moving body along its force sensing axis (38). The accelerometers (32a and b) are mounted within the substrate (16) to be moved along a vibration axis (41). The accelerometers (32a and b) are vibrated or dithered to increase the Coriolis component of the output signals from the accelerometers (32a and b). A sinusoidal drive signal of a predetermined frequency is applied to a conductive path (92) disposed on each of the accelerometers. Further, magnetic flux is directed to cross each of the conductive paths (92), whereby the interaction of the magnetic flux and of the drive signal passing therethrough causes the desired dithering motion.
IPC结构图谱:
F | 机械工程;照明;加热;武器;爆破 |
--F02 | 燃烧发动机;热气或燃烧生成物的发动机装置 |
----F02G | 热气或燃烧产物的变容式发动机装置;不包含在其他类目中的燃烧发动机余热的利用 |
------F02G1/00 | 热气变容式发动机装置 |
--------F02G1/04 | .闭式循环 |
----------F02G1/043 | ..依靠工作气体的膨胀和压缩推动的发动机,该工作气体在始终连通的一组可膨胀室之一里被加热和冷却,如斯特林循环发动机 |
------------F02G1/044 | ...具有至少两个工作元件,如活塞,提供功率输出 |