基本信息:
- 专利标题： 测温连接组件及MOCVD设备
- 专利标题（英）：Temperature measurement connecting assembly and MOCVD equipment
- 申请号：CN201822005558.5 申请日：2018-11-30
- 公开(公告)号：CN209570280U 公开(公告)日：2019-11-01
- 发明人： 倪志松 , 尹翔 , 朱磊
- 申请人： 东泰高科装备科技有限公司
- 申请人地址： 北京市昌平区科技园区中兴路10号A129-1室
- 专利权人： 东泰高科装备科技有限公司
- 当前专利权人： 紫石能源有限公司
- 当前专利权人地址： 北京市昌平区科技园区中兴路10号A129-1室
- 代理机构： 北京康信知识产权代理有限责任公司
- 代理人： 韩建伟; 张亚辉
- 主分类号： G01K11/32
- IPC分类号： G01K11/32 ; G01K1/00
The utility model provides a temperature measurement connecting assembly and MOCVD equipment, the temperature measurement connecting assembly comprises a temperature sensor, a movable sleeve and an optical fiber structure, the first end of the movable sleeve is in sealed connection with a cavity needing temperature measurement, and the second end of the movable sleeve is in sealed connection withthe temperature sensor; the optical fiber structure is arranged in the movable sleeve, the first end of the optical fiber structure penetrates through a cavity needing to be measured, and the second end of the optical fiber structure is inserted into the temperature sensor. According to the technical scheme provided by the utility model, the problem of inaccurate temperature measurement of MOCVD equipment in the prior art is effectively solved.
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01K | 温度测量；热量测量；未列入其他类目的热敏元件 |
| ------G01K11/00 | 不包括在G01K3/00，G01K5/00，G01K7/00或G01K9/00各组的以物理或化学变化为基础的温度测量 |
| --------G01K11/32 | .利用在光纤中的透射、散射或荧光的变化 |