![一种双列直插式真空矩阵键合夹具](/CN/2018/2/397/images/201821989876.jpg)
基本信息:
- 专利标题: 一种双列直插式真空矩阵键合夹具
- 专利标题(英):Double-row in-line vacuum matrix bonding clamp
- 申请号:CN201821989876.3 申请日:2018-11-29
- 公开(公告)号:CN209150074U 公开(公告)日:2019-07-23
- 发明人: 张超超 , 聂平建 , 周东 , 陈潇 , 谌帅业 , 蔡景洋 , 商登辉 , 李阳 , 房迪
- 申请人: 贵州振华风光半导体有限公司
- 申请人地址: 贵州省贵阳市新添大道北段238号
- 专利权人: 贵州振华风光半导体有限公司
- 当前专利权人: 贵州振华风光半导体股份有限公司
- 当前专利权人地址: 贵州省贵阳市新添大道北段238号
- 代理机构: 贵阳中工知识产权代理事务所
- 代理人: 刘安宁
- 主分类号: H01L21/683
- IPC分类号: H01L21/683 ; H01L21/67
The utility model discloses a double-row in-line vacuum matrix bonding clamp, which is provided with a rectangular bonding platform, a plurality of tube shell tables are arranged on the bonding platform according to a matrix mode, a vacuum hole is formed in the center of each tube shell table, and a tube shell is sucked by utilizing vacuum suction force; double-row straight slots are formed in thetwo sides in parallel and are used for inserting pins of the tube shell; two limiting blocks are arranged at the two ends of each tube shell table respectively and used for limiting the position of atube shell, and a clamping opening is formed in one tube shell table. The clamp has the main advantages that the manufacturing process is simple, limiting is accurate, due to the design of the tweezers clamping port, a tube shell is convenient to take and place, and friction abrasion between the clamp and a product shell is effectively avoided; the tube shell is in smooth contact with the clamp through vacuum suction force, and the flatness of the tube shell can be checked; and the matrix design can improve the working efficiency of the automatic bonding machine. According to the clamp, the vacuum matrix clamp suitable for bonding of other double-row in-line integrated circuits can be manufactured according to the sizes and shapes of different double-row in-line shells.