
基本信息:
- 专利标题: GaN基垂直型功率晶体管器件
- 专利标题(英):GaN-based vertical power transistor device
- 申请号:CN201820816541.5 申请日:2018-05-28
- 公开(公告)号:CN209119111U 公开(公告)日:2019-07-16
- 发明人: 刘新宇 , 王成森 , 黄森 , 王鑫华 , 康玄武 , 魏珂 , 黄健
- 申请人: 捷捷半导体有限公司 , 中国科学院微电子研究所
- 申请人地址: 江苏省南通市苏通科技产业园井冈山路6号
- 专利权人: 捷捷半导体有限公司,中国科学院微电子研究所
- 当前专利权人: 捷捷半导体有限公司,中国科学院微电子研究所
- 当前专利权人地址: 江苏省南通市苏通科技产业园井冈山路6号
- 代理机构: 中科专利商标代理有限责任公司
- 代理人: 任岩
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/06 ; H01L21/336
The utility model provides a GaN-based vertical power transistor device. The GaN-based vertical power transistor device comprises an N-type GaN substrate, a P-type GaN substrate, a P-type GaN layer, aP-type GaN layer and a P-type GaN layer, wherein the N-type GaN epitaxial layer is formed on the N-type GaN substrate; the Al (In, Ga) N back barrier layer is formed on the N-type GaN epitaxial layer; a thin barrier Al (In, Ga) N/GaN heterostructure formed on the Al (In, Ga) N back barrier layer; wherein the passivation layer, the grid electrode and the source electrode are formed on the thin barrier Al (In, Ga) N/GaN heterostructure, and the drain electrode is formed on the N-type GaN substrate. According to the GaN-based vertical power transistor device disclosed by the utility model, the process difficulty of the GaN-based vertical power transistor is effectively reduced, so that the GaN-based vertical power transistor device is compatible with the process of a conventional GaN-based transverse device, and the application of the GaN-based vertical power transistor in higher current and power conversion is promoted.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/762 | ....电荷转移器件 |
----------------H01L29/78 | .....由绝缘栅产生场效应的 |