The utility model discloses a layer secondary source system with magnetron reason terminal calibrating installation, including power module, low pressure supply module, high voltage isolation module, high -pressure supply module, high -voltage insulation test module and electric capacity partial pressure module, wherein: power module's output is connected with the input of low pressure supply module, high voltage isolation module and high -voltage insulation test module respectively, the output of high voltage isolation module is connected with high -pressure supply module's input, the output and electric capacity partial pressure module's the input of high -voltage insulation test module are connected, electric capacity partial pressure module's output is connected with high -pressure supply module's input. The utility model relates to a layer secondary source system with magnetron reason terminal calibrating installation, the layer secondary source simple structure of system utilizes electric capacity partial pressure principle, the easy realization, and the design cost is low, keeps apart effectually, stable good. The utility model relates to a but layer secondary source system with magnetron reason terminal calibrating installation wide application in device examination field.