Compact owner pulsed discharge power in capillary discharge Z constriction extreme ultraviolet source, relate to the power, for the bulky problem of solving current main pulsed discharge power, the three -terminal of the three -phase voltage output end of electric wire netting is continuous with the three -terminal of high -voltage regulator three -phase voltage input end respectively, the output of high -voltage regulator links to each other with high voltage transformers's input, high voltage transformers's output links to each other with the voltage input of master clock owner discharge power supply main part end, the elementary high voltage output end of master clock owner discharge power supply main part links to each other with the voltage input end of pulse compression device, the control signal output no. 1 of switch board links to each other with the control signal input of master clock owner discharge power supply main part, the control signal output no. 2 of switch board links to each other with the control signal input of pulse compression device. The utility model discloses a power structure is compact, and the device is simple, is convenient for use, and it provides the power for the extreme ultraviolet source to be applicable to.