
基本信息:
- 专利标题: 基于钛基三层金属膜的石英晶体微天平传感器
- 专利标题(英):Quartz crystal microbalance sensor based on titanium base three-layer metal films
- 申请号:CN201220313732.2 申请日:2012-07-02
- 公开(公告)号:CN202614627U 公开(公告)日:2012-12-19
- 发明人: 曹忠 , 龙姝 , 周婷 , 龙文斌 , 徐雷涛 , 闫璐璐
- 申请人: 长沙理工大学
- 申请人地址: 湖南省长沙市雨花区万家丽南路二段960号长沙理工大学化学与生物工程学院
- 专利权人: 长沙理工大学
- 当前专利权人: 长沙理工大学
- 当前专利权人地址: 湖南省长沙市雨花区万家丽南路二段960号长沙理工大学化学与生物工程学院
- 主分类号: G01N5/00
- IPC分类号: G01N5/00 ; G01N11/00 ; G01N9/04 ; G01G3/16 ; G01R27/02 ; G01R27/26
The utility model provides a quartz crystal microbalance sensor based on titanium base three-layer metal films. The sensor comprises a quartz crystal sheet (1), wherein a titanium plating film layer (2) is arranged on the surface of the quartz crystal sheet (1), a silver plating film layer (3) is arranged on the surface of the titanium plating film layer (2), a gold plating film layer (4) is arranged on the surface of the silver plating film layer (3), and the quartz crystal microbalance sensor based on the titanium base three-layer metal films is formed. The sensor provided by the utility model has the effects and beneficial points that the quartz crystal microbalance sensor based on the titanium base three-layer metal films has the advantages that the manufacture is simple, the cost is low, the sensitivity is high, the anticorrosion performance and the stability are good, and the like; and the quartz crystal microbalance sensor based on the titanium base three-layer metal films is superior to the traditional quartz crystal microbalance sensor.
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N5/00 | 用称量的方法分析材料,例如称量从气体或液体分离出的微粒 |