基本信息:
- 专利标题： 蒸镀掩模用基材、蒸镀掩模用基材的制造方法、蒸镀掩模的制造方法以及显示装置的制造方法
- 申请号：CN201880049314.7 申请日：2018-10-26
- 公开(公告)号：CN110997970A 公开(公告)日：2020-04-10
- 发明人： 新纳干大 , 仓田真嗣 , 三上菜穗子
- 申请人： 凸版印刷株式会社
- 申请人地址： 日本东京都
- 专利权人： 凸版印刷株式会社
- 当前专利权人： 凸版印刷株式会社
- 当前专利权人地址： 日本东京都
- 代理机构： 永新专利商标代理有限公司
- 代理人： 牛玉婷
- 优先权： 2018-076427 2018.04.11 JP
- 国际申请： PCT/JP2018/039966 2018.10.26
- 国际公布： WO2019/198263 JA 2019.10.17
- 进入国家日期： 2020-01-22
- 主分类号： C23C14/04
- IPC分类号： C23C14/04 ; C25D1/04
This vapor deposition mask base material is a metal foil formed using electroplating. The metal foil is made of a nickel-iron alloy, and includes a first surface and a second surface that is opposite the first surface. The first surface has a first nickel mass ratio (mass%), which is the percentage of the nickel mass with respect to the sum of the iron mass and the nickel mass of the first surface. The second surface has a second nickel mass ratio (mass%), which is the percentage of the nickel mass with respect to the sum of the iron mass and nickel mass of the second surface. The absolute value of the difference between the first nickel mass ratio (mass%) and the second nickel mass ratio (mass%) is the mass difference (mass%). The mass difference divided by the thickness (μm) of the vapor deposition mask material is the standard value. The standard value is 0.05 (mass%/μm) or less.