![用于铅化学机械抛光的抛光液及抗氧化工艺](/CN/2019/1/180/images/201910903917.jpg)
基本信息:
- 专利标题: 用于铅化学机械抛光的抛光液及抗氧化工艺
- 专利标题(英):Polishing solution for chemico-mechanical polishing of lead, and anti-oxidation technology thereof
- 申请号:CN201910903917.5 申请日:2019-09-24
- 公开(公告)号:CN110564303A 公开(公告)日:2019-12-13
- 发明人: 余家欣 , 蔡荣 , 王超 , 孙名宏
- 申请人: 西南科技大学 , 中国工程物理研究院机械制造工艺研究所
- 申请人地址: 四川省绵阳市涪城区青龙大道中段59号
- 专利权人: 西南科技大学,中国工程物理研究院机械制造工艺研究所
- 当前专利权人: 西南科技大学,中国工程物理研究院机械制造工艺研究所
- 当前专利权人地址: 四川省绵阳市涪城区青龙大道中段59号
- 代理机构: 北京远大卓悦知识产权代理事务所
- 代理人: 张忠庆
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; B24B1/00 ; C23F3/06 ; C23C22/58
The invention discloses a polishing solution for chemico-mechanical polishing of lead. The polishing solution for chemico-mechanical polishing of lead comprises: a fine polishing solution comprising abrasive grains, an oxidant, a metal complexing agent, a lubricant and deionized water, wherein the pH value of the fine polishing solution is regulated by adopting a pH regulator; and an anti-oxidation fine polishing solution comprises the abrasive grains, the oxidant, the metal complexing agent, the lubricant and deionized water, wherein the pH of the anti-oxidation fine polishing solution is regulated by adopting the pH regulator. The polishing solution for chemico-mechanical polishing of lead, and a corresponding polishing process thereof can greatly improve the surface flatness and reducethe surface roughness during pure lead polishing, so the surface of the lead is rapidly flat wholly, the polished surface has no defects such as obvious corrosion pits and scratches, and the problemsof plastic flowing, thermal deformation and impurity embedding (such as abrasive particle embedding) of the polished surface layer of a soft material are effectively avoided, thereby the ultra-smoothand damage-free surface of the lead block is obtained, and the good polishing effect of chemico-mechanical polishing of lead is achieved.
公开/授权文献:
- CN110564303B 用于铅化学机械抛光的抛光液及抗氧化工艺 公开/授权日:2020-12-15
IPC结构图谱:
C | 化学;冶金 |
--C09 | 染料;涂料;抛光剂;天然树脂;黏合剂;其他类目不包含的组合物;其他类目不包含的材料的应用 |
----C09G | 虫胶清漆除外的抛光组合物;滑雪屐蜡 |
------C09G1/00 | 抛光组合物 |
--------C09G1/02 | .含有磨料或研磨剂 |