
基本信息:
- 专利标题: 基于质谱测量激光烧蚀等离子体物种时间演化测量方法
- 专利标题(英):Method for measuring time evolution of laser ablation plasma species based on mass-spectrometer measurement
- 申请号:CN201910504578.3 申请日:2019-06-12
- 公开(公告)号:CN110186995A 公开(公告)日:2019-08-30
- 发明人: 丁洪斌 , 郝媛杰 , 吴鼎 , 冯春雷 , 李聪 , 海然
- 申请人: 大连理工大学
- 申请人地址: 辽宁省大连市甘井子区凌工路2号
- 专利权人: 大连理工大学
- 当前专利权人: 大连理工大学
- 当前专利权人地址: 辽宁省大连市甘井子区凌工路2号
- 代理机构: 大连星海专利事务所有限公司
- 代理人: 裴毓英
- 主分类号: G01N27/62
- IPC分类号: G01N27/62
The invention relates to the technical field of mass spectrometry, and provides a method for measuring time evolution of laser ablation plasma species based on mass-spectrometer measurement. The method comprises the following steps of: step 1: placing a target in a vacuum extraction field chamber of a time-of-flight mass spectrometer, adjusting a laser light path, and selecting a space range selection separation blade meeting the measurement requirements; step 2, setting a laser, a high-voltage pulse electric field, and a door opening timing sequence and a gate width between ion detectors through a digital delay pulse generator and a LabVIEW virtual experiment platform control program; step 3, after a laser ablation target of each pulse generates plasma, causing ions satisfying specific conditions to enter a vacuum field-free drift chamber to obtain mass spectrometry data; and step 4, transmitting the collected mass spectrometry data to a computer, and performing processing and displayto obtain get corresponding ion species information. The method provided by the invention can be used for detecting the time evolution of multi-charged ions in the plasma at the same time.
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N27/00 | 用电、电化学或磁的方法测试或分析材料 |
--------G01N27/62 | .通过测试气体的电离,通过测试放电,例如阴极发射 |