![一种选择性正面钝化PERC太阳能电池的制备方法](/CN/2019/1/61/images/201910306879.jpg)
基本信息:
- 专利标题: 一种选择性正面钝化PERC太阳能电池的制备方法
- 专利标题(英):Method for preparing selective front passivation PERC solar cell
- 申请号:CN201910306879.5 申请日:2019-04-17
- 公开(公告)号:CN110137270A 公开(公告)日:2019-08-16
- 发明人: 林纲正 , 方结彬 , 张小明
- 申请人: 天津爱旭太阳能科技有限公司 , 浙江爱旭太阳能科技有限公司
- 申请人地址: 天津市北辰区天津北辰经济技术开发区科技园高新大道与景通路交口东北侧
- 专利权人: 天津爱旭太阳能科技有限公司,浙江爱旭太阳能科技有限公司
- 当前专利权人: 天津爱旭太阳能科技有限公司,浙江爱旭太阳能科技有限公司
- 当前专利权人地址: 天津市北辰区天津北辰经济技术开发区科技园高新大道与景通路交口东北侧
- 代理机构: 广州知友专利商标代理有限公司
- 代理人: 侯莉
- 主分类号: H01L31/0216
- IPC分类号: H01L31/0216 ; H01L31/0224 ; H01L31/0352 ; H01L31/18
The invention discloses a method for preparing a selective front passivation PERC solar cell, comprising the steps of: (1) texturing P-type silicon; (2) forming an N-type film on a front surface; (3)waxing an area, corresponding to a positive silver electrode pattern, on the N-type film, and drying the wax; (4) removing the N-type film in the unwaxed area of the P-type silicon; (5) diffusing a phosphorus source to form the N-type silicon; (6) removing the wax and the phosphorus-silicon glass and a peripheral PN junction formed during the diffusion process, etching the back side of the siliconwafer; (7) performing annealing; (8) depositing a front passivation film and a back passivation film; (9) laser grooving the back side to pass through the back passivation film; (10) printing and drying back silver electrode paste; (11) printing and drying the aluminum paste on the back side; (12) printing and drying positive silver electrode paste on the N-type film; (13) performing high-temperature sintering; and (14) performing anti-LID annealing. The passivation effect of the front passivation film and the field passivation effect of the N-type film can reduce the recombination rate of minority carriers, and enhance the passivation effect. The N-type film can reduce the contact resistance and improve the photoelectric conversion efficiency of the cell.