The invention relates to a random number generator, a self-checking module and a self-checking method of the random number generator. The random number generator comprises a random source generation circuit, a post-processing circuit and a random number hardware self-checking module; the random source generation circuit is used for generating multiple paths of initial random numbers, combining themultiple paths of initial random numbers into an initial random number sequence, and outputting the initial random number sequence to the post-processing circuit; the post-processing circuit is usedfor carrying out equalization processing on the input initial random number sequence and outputting one path of final random number sequence; the random number hardware self-checking modules are in one-to-one correspondence with the random number channels in the random number generator and are used for monitoring whether the random number sequences in the random number channels meet the set conditions or not; and the random number channels comprise the output channels of the multiple paths of initial random numbers, an output channel of the random source generation circuit and an output channel of the post-processing circuit. According to the embodiment of the invention, the problem that a monitoring result given by a traditional software monitoring mode has lag is solved, and the requirement for a monitoring environment is simplified.