
基本信息:
- 专利标题: 一种双极型阈值选通器及其制备方法
- 专利标题(英):Bipolar threshold value gate and preparation method
- 申请号:CN201910166048.2 申请日:2019-03-06
- 公开(公告)号:CN109888093A 公开(公告)日:2019-06-14
- 发明人: 张楷亮 , 黄金荣 , 王芳 , 李文习 , 董凯飞 , 单欣
- 申请人: 天津理工大学
- 申请人地址: 天津市西青区宾水西道391号
- 专利权人: 天津理工大学
- 当前专利权人: 天津理工大学
- 当前专利权人地址: 天津市西青区宾水西道391号
- 代理机构: 天津耀达律师事务所
- 代理人: 张耀
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
The invention discloses a bipolar threshold gate and a preparation method thereof, and belongs to the field of memory integration. The bipolar threshold gate comprises a SiO2 substrate prepared by oxidation, an adhesive layer, a lower electrode, an insulating medium layer, an oxygen storage layer and an upper electrode, and the adhesive layer, the lower electrode, the insulating medium layer, theoxygen storage layer and the upper electrode are arranged above the substrate, wherein the oxygen storage layer is an oxide layer formed by annealing oxidation, which respectively supplies and storesoxygen vacancies for the formation and fracture of a conductive filament; and the oxygen storage layer can be used as a barrier layer to prevent the ion implantation phenomenon of the upper electrodeon the resistance change layer in the sputtering process. The insulating medium layer material is a binary oxide, and the stoichiometric ratio of the binary oxide to oxygen atoms of the oxygen storagelayer is different. The bipolar threshold gate has the function of bidirectional gating, can effectively inhibit leakage current in a three-dimensional structure and a cross array resistance random access memory, and is a gating device with great application prospect.