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基本信息:
- 专利标题: 基于自补偿式平移轴的长干涉光腔调谐装置和方法
- 专利标题(英):Long interference optical cavity tuning device and method based on self-compensating translation axis
- 申请号:CN201910230825.5 申请日:2019-03-26
- 公开(公告)号:CN109883657A 公开(公告)日:2019-06-14
- 发明人: 张涛 , 焦建瑛 , 李清 , 王嵩梅 , 张研超 , 何少平 , 李彦爽
- 申请人: 北京市燃气集团有限责任公司
- 申请人地址: 北京市西城区西直门南小街22号
- 专利权人: 北京市燃气集团有限责任公司
- 当前专利权人: 北京市燃气集团有限责任公司
- 当前专利权人地址: 北京市西城区西直门南小街22号
- 代理机构: 北京天方智力知识产权代理事务所
- 代理人: 谷成
- 主分类号: G01M11/02
- IPC分类号: G01M11/02
The invention provides a long interference optical cavity tuning device and method based on a self-compensating translation axis. The device comprises a laser, sliding tables, first and second translation axis interference measurement modules, an imaging lens, an image sensor and a computer, wherein the sliding tables are mounted on a precision guide rail; the sliding tables can move between firstand second interference optical cavity endoscopes along a preset light path; the first and second translation axis interference measurement modules are arranged on the sliding tables; each translation axis interference measurement module comprises a first small collimation hole, a beam splitting prism, a second small collimation hole and first and second interference measurement module endoscopes, which are sequentially arranged on the preset light path; the first and second interference measurement module endoscopes are arranged at both sides of the beam splitting prisms and positioned on corresponding interference light paths; the interference light paths of the first and second translation axis interference measurement modules are perpendicular to each other; the imaging lens is used for carrying out imaging on interference images of the first and second translation axis interference measurement modules; the image sensor is used for outputting digital images of the interference images; and the computer is used for processing the digital images and feeding back a self-compensating multi-axis precision regulation strategy according to a processing result.
公开/授权文献:
- CN109883657B 基于自补偿式平移轴的长干涉光腔调谐装置和方法 公开/授权日:2020-05-08
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01M | 机器或结构部件的静或动平衡的测试;未列入其他类目的结构部件或设备的测试 |
------G01M11/00 | 光学设备的测试;其他类目未包括的用光学方法测试结构部件 |
--------G01M11/02 | .光学性质的测试 |