![图像传感器及其形成方法](/CN/2019/1/22/images/201910114624.jpg)
基本信息:
- 专利标题: 图像传感器及其形成方法
- 专利标题(英):Image sensor and forming method thereof
- 申请号:CN201910114624.9 申请日:2019-02-14
- 公开(公告)号:CN109817653A 公开(公告)日:2019-05-28
- 发明人: 林永璨 , 黄晓橹
- 申请人: 德淮半导体有限公司
- 申请人地址: 江苏省淮安市淮阴区长江东路599号
- 专利权人: 德淮半导体有限公司
- 当前专利权人: 德淮半导体有限公司
- 当前专利权人地址: 江苏省淮安市淮阴区长江东路599号
- 代理机构: 北京集佳知识产权代理有限公司
- 代理人: 徐文欣; 吴敏
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
The invention discloses an image sensor and a forming method thereof. The image sensor comprises the following parts: a substrate, which comprises a plurality of mutually separated photoelectric regions; an isolation layer, which is located on the surface of the substrate, wherein the material of the isolation layer has a first refractive index; openings, which are located in the photoelectric region isolation layers, wherein the included angles formed by the side walls of the openings and the top surfaces of the isolation layers are obtuse angles; an optical filter, which is located in the opening, wherein the material of the optical filter has a second refractive index, and the second refractive index is greater than the first refractive index; and a lens, which is positioned on the surface of the optical filter. According to the image sensor, optical crosstalk can be reduced, and meanwhile the photon conversion efficiency can be improved.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L27/00 | 由在一个共用衬底内或其上形成的多个半导体或其他固态组件组成的器件 |
--------H01L27/02 | .包括有专门适用于整流、振荡、放大或切换的半导体组件并且至少有一个电位跃变势垒或者表面势垒的;包括至少有一个跃变势垒或者表面势垒的无源集成电路单元的 |
----------H01L27/144 | ..由辐射控制的器件 |
------------H01L27/146 | ...图像结构 |