
基本信息:
- 专利标题: 一种观察透明晶片指定区域微观形貌的快速定位方法
- 专利标题(英):Rapid positioning method for observing microstructure of designated area of transparent wafer
- 申请号:CN201910168455.7 申请日:2019-03-06
- 公开(公告)号:CN109799242A 公开(公告)日:2019-05-24
- 发明人: 杨丹丹 , 李晖 , 张弛 , 高飞 , 孙雪莲 , 程红娟 , 郝建民 , 赖占平 , 李宝珠
- 申请人: 中国电子科技集团公司第四十六研究所
- 申请人地址: 天津市河西区洞庭路26号
- 专利权人: 中国电子科技集团公司第四十六研究所
- 当前专利权人: 中国电子科技集团公司第四十六研究所
- 当前专利权人地址: 天津市河西区洞庭路26号
- 代理机构: 天津中环专利商标代理有限公司
- 代理人: 王凤英
- 主分类号: G01N21/88
- IPC分类号: G01N21/88 ; G01N21/95 ; G01N21/958 ; G01N21/84
The invention discloses a rapid positioning method for observing the microstructure of a designated area of a transparent wafer. The method includes the steps: 1 positioning a specific area of the transparent wafer with the known microstructure and performing other research on the position; 2 observing the microstructure of the designated area of the transparent wafer at known positioning coordinates. Coordinate objects designed by the method are squares formed by transverse lines and vertical lines, the squares are filled in with position codes, and the edge length sizes of the squares are set according to an area needing observation or a microscope observation area, and the coordinate objects are bearing materials made of printing paper or other materials which can be shaped, recorded and marked. The method has universality, the newly developed coordinate objects can be used under the microscope, geometric coordinates are calculated through the coordinate objects at the position observed under the microscope to realize accurate positioning, working time and unnecessary workload are reduced, damage and contamination caused by marking on the surface of a sample, and the method hasremarkable practicability for scientific research non-standard products.
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N21/00 | 利用光学手段,即利用红外光、可见光或紫外光来测试或分析材料 |
--------G01N21/01 | .便于进行光学测试的装置或仪器 |
----------G01N21/88 | ..测试瑕疵、缺陷或污点的存在 |