![一种动态特性测试的激波聚焦激励装置及其工作方法](/CN/2018/1/307/images/201811538824.jpg)
基本信息:
- 专利标题: 一种动态特性测试的激波聚焦激励装置及其工作方法
- 专利标题(英):Shock wave focusing excitation device for dynamic characteristic testing and working method of device
- 申请号:CN201811538824.9 申请日:2018-12-17
- 公开(公告)号:CN109682558A 公开(公告)日:2019-04-26
- 发明人: 田江平 , 崔靖晨 , 田华 , 隆武强 , 冯立岩 , 陈博
- 申请人: 大连理工大学
- 申请人地址: 辽宁省大连市高新园区凌工路2号
- 专利权人: 大连理工大学
- 当前专利权人: 大连理工大学
- 当前专利权人地址: 辽宁省大连市高新园区凌工路2号
- 代理机构: 大连星海专利事务所有限公司
- 代理人: 花向阳; 杨翠翠
- 主分类号: G01M7/02
- IPC分类号: G01M7/02 ; B81C99/00 ; B81B7/02
The invention relates to a shock wave focusing excitation device for dynamic characteristic testing and a working method of the device, and belongs to the technical field of micro-machinery and electronics. The device comprises a cylinder, a micro-structural excitation unit and light heating units; the micro-structural excitation unit is provided with a shock wave focusing cavity with a semi-ellipsoid cavity, needle electrodes sleeve the two opposite side surfaces of the shock wave focusing cavity through ceramic tubes, needle tips of the needle electrodes are located near the focus in a cavity body of the semi-ellipsoid cavity, and the distance between the needle tips of the two needle electrodes is 0.5-1.0 mm; the four uniformly distributed light heating units are arranged on the top ofthe cylinder, and four shade plates are applied in each light heating unit, so that parallel light emitted by the light heating units can only be irradiated on the MEMS micro-structure. According to the device, the whole micro-structure can be heated at the same time, the uniform temperature distribution of the micro-structure surface is guaranteed, the temperature gradient of the micro-structuresurface is lowered, and the accuracy of the dynamic characteristic parameter test of the micro-structures in a high temperature environment is greatly improved.
公开/授权文献:
- CN109682558B 一种动态特性测试的激波聚焦激励装置及其工作方法 公开/授权日:2020-05-19
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01M | 机器或结构部件的静或动平衡的测试;未列入其他类目的结构部件或设备的测试 |
------G01M7/00 | 结构部件的振动测试;结构部件的冲击测试 |
--------G01M7/02 | .振动测试 |