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基本信息:
- 专利标题: 一种氮化镓基发光二极管外延片及其生长方法
- 专利标题(英):Gallium nitride-based light-emitting diode epitaxial wafer and growth method thereof
- 申请号:CN201811063800.2 申请日:2018-09-12
- 公开(公告)号:CN109473511A 公开(公告)日:2019-03-15
- 发明人: 王倩 , 洪威威 , 陆香花 , 周飚 , 胡加辉
- 申请人: 华灿光电(苏州)有限公司
- 申请人地址: 江苏省苏州市张家港市经济开发区晨丰公路
- 专利权人: 华灿光电(苏州)有限公司
- 当前专利权人: 华灿光电(苏州)有限公司
- 当前专利权人地址: 江苏省苏州市张家港市经济开发区晨丰公路
- 代理机构: 北京三高永信知识产权代理有限责任公司
- 代理人: 徐立
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01L33/02 ; H01L21/67
The invention discloses a gallium nitride-based light-emitting diode (LED) epitaxial wafer and a growth method thereof, and belongs to the technical field of a semiconductor. The growth method comprises the steps of providing a substrate; growing an N-type semiconductor layer on the substrate; growing an active layer on the N-type semiconductor layer; growing a first P-type semiconductor layer onthe active layer in a growth atmosphere formed by hydrogen; and growing a second P-type semiconductor layer on the first P-type semiconductor layer in a growth atmosphere formed by nitrogen; wherein each of the first P-type semiconductor layer and the second P-type semiconductor layer comprises multiple magnesium nitride layers and multiple magnesium-doped gallium nitride layers, and the multiplemagnesium nitride layers and the multiple magnesium-doped gallium nitride layers are alternately stacked. With the gallium nitride-based light-emitting diode epitaxial wafer and the growth method thereof, the concentration of holes in the P-type semiconductor layer can be increased and the light-emitting efficiency of the LED is finally improved.
公开/授权文献:
- CN109473511B 一种氮化镓基发光二极管外延片及其生长方法 公开/授权日:2020-07-07