![基于h-BN/p-AlGaN超晶格的高效深紫外发光二极管](/CN/2018/1/284/images/201811421092.jpg)
基本信息:
- 专利标题: 基于h-BN/p-AlGaN超晶格的高效深紫外发光二极管
- 专利标题(英):Efficient deep ultraviolet light emitting diode based on h-BN (Boron Nitride)/p-AlGaN superlattice
- 申请号:CN201811421092.5 申请日:2018-11-27
- 公开(公告)号:CN109411576A 公开(公告)日:2019-03-01
- 发明人: 周小伟 , 王燕丽 , 吴金星 , 李培咸 , 许晟瑞 , 马晓华 , 郝跃
- 申请人: 西安电子科技大学
- 申请人地址: 陕西省西安市雁塔区太白南路2号
- 专利权人: 西安电子科技大学
- 当前专利权人: 西安电子科技大学
- 当前专利权人地址: 陕西省西安市雁塔区太白南路2号
- 代理机构: 陕西电子工业专利中心
- 代理人: 王品华; 朱红星
- 主分类号: H01L33/04
- IPC分类号: H01L33/04 ; H01L33/06 ; H01L33/14 ; H01L33/00
The invention discloses an efficient deep ultraviolet light emitting diode based on an h-BN (Boron Nitride)/p-AlGaN superlattice, and a preparation method thereof, and aims to solve the problems of low hole concentration and current congestion of an existing deep ultraviolet light emitting diode. The efficient deep ultraviolet light emitting diode disclosed by the invention comprises a substrate (1), an n-type AlxGal-xN layer (2), an AlyGal-yN/AlzGal-zN multi-quantum-well layer (3) and a p-type layer (4) from bottom to top and is characterized in that the p-type layer (4) adopts the h-BN/ p-AlGaN superlattice, i.e. an h-BN layer and a p-AlwGal-wN layer alternately grow, and each h-BN layer and the p-AlwGal-wN layer on the top of the h-BN layer are combined to form a period to totally growfor 5-40 periods. By use of the efficient deep ultraviolet light emitting diode, the electrical conductivity of the device is improved, hole concentration is increased, current congestion is alleviated, so that the deep ultraviolet light emitting diode with high light emitting power is obtained, and the efficient deep ultraviolet light emitting diode can be used in deep ultraviolet light emittingequipment.