![一种石英晶体微天平湿度传感器的制备方法及产品](/CN/2018/1/126/images/201810633969.jpg)
基本信息:
- 专利标题: 一种石英晶体微天平湿度传感器的制备方法及产品
- 专利标题(英):Preparation method and product of quartz crystal microbalance humidity sensor
- 申请号:CN201810633969.0 申请日:2018-06-20
- 公开(公告)号:CN108982277A 公开(公告)日:2018-12-11
- 发明人: 廖广兰 , 林建斌 , 谭先华 , 史铁林 , 汤自荣
- 申请人: 华中科技大学
- 申请人地址: 湖北省武汉市洪山区珞喻路1037号
- 专利权人: 华中科技大学
- 当前专利权人: 华中科技大学
- 当前专利权人地址: 湖北省武汉市洪山区珞喻路1037号
- 代理机构: 华中科技大学专利中心
- 代理人: 张彩锦; 曹葆青
- 主分类号: G01N5/02
- IPC分类号: G01N5/02
The invention belongs to the technical field of humidity sensors, and particularly discloses a preparation method and product of a quartz crystal microbalance humidity sensor. The method comprises thefollowing steps: S1, preparing a seed layer, namely depositing a Cu seed layer on a quartz crystal microbalance to serve as a humidity-sensitive layer material for subsequent growing a super-hydrophilic nano-wire; S2, preparing the humidity-sensitive layer, namely placing the quartz crystal microbalance deposited with the Cu seed layer in a NaOH and (NH4)2S2O4 mixed solution to grow a super-hydrophilic Cu(OH)2 nano-wire on the Cu seed layer to obtain a quartz crystal microbalance humidity sensor device. The product comprises a quartz crystal microbalance, the seed layer arranged on the frontside and/or back side of the quartz crystal microbalance and a nano-wire growing on the seed layer. The humidity sensor formed by the method has a response speed less than 1 second, and has the characteristics of high response, high sensitivity, good repeatability, stable performance and the like.
公开/授权文献:
- CN108982277B 一种石英晶体微天平湿度传感器的制备方法及产品 公开/授权日:2020-05-19
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N5/00 | 用称量的方法分析材料,例如称量从气体或液体分离出的微粒 |
--------G01N5/02 | .利用物质吸收或吸附某些组分并测定吸附剂的重量变化,例如测定含水量 |