![存储器结构及其制作方法](/CN/2017/1/81/images/201710407714.jpg)
基本信息:
- 专利标题: 存储器结构及其制作方法
- 专利标题(英):Memory structure and manufacturing method thereof
- 申请号:CN201710407714.8 申请日:2017-06-02
- 公开(公告)号:CN108962900A 公开(公告)日:2018-12-07
- 发明人: 施凯侥 , 冯祺凯 , 王思婷 , 尹德源
- 申请人: 力晶科技股份有限公司
- 申请人地址: 中国台湾新竹科学工业园区
- 专利权人: 力晶科技股份有限公司
- 当前专利权人: 力晶科技股份有限公司
- 当前专利权人地址: 中国台湾新竹科学工业园区
- 代理机构: 北京市柳沈律师事务所
- 代理人: 陈小雯
- 优先权: 106116262 20170517 TW
- 主分类号: H01L27/11521
- IPC分类号: H01L27/11521
The invention discloses a memory structure and a manufacturing method thereof. The memory comprises a semiconductor substrate, at least two shallow trench isolations, an active region, a first dielectric layer, a floating gate, a second dielectric layer and a control gate. The shallow trench isolations are adjacently arranged in the semiconductor substrate. The active region is disposed in the semiconductor substrate and located between the shallow trench isolations. The first dielectric layer is disposed on the surface of the active region. The floating gate is disposed on the semiconductor substrate and has a stepped sidewall, and comprises an upper portion and a lower portion, wherein the width of the upper portion is smaller than the width of the lower portion, the lower portion stretches across the active region and extends to the shallow trench isolations and partially covers the shallow trench isolations. The second dielectric layer covers the floating gate. The control gate isdisposed on the second dielectric layer.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L27/00 | 由在一个共用衬底内或其上形成的多个半导体或其他固态组件组成的器件 |
--------H01L27/02 | .包括有专门适用于整流、振荡、放大或切换的半导体组件并且至少有一个电位跃变势垒或者表面势垒的;包括至少有一个跃变势垒或者表面势垒的无源集成电路单元的 |
----------H01L27/04 | ..其衬底为半导体的 |
------------H01L27/06 | ...在非重复结构中包括有多个单个组件的 |
--------------H01L27/105 | ....包含场效应组件的 |
----------------H01L27/112 | .....只读存储器结构的 |
------------------H01L27/115 | ......电动编程只读存储器 |
--------------------H01L27/11502 | .......具有铁电体存储器电容器的 |
----------------------H01L27/11521 | ........以存储器核心区为特征的 |