基本信息:
- 专利标题： 用于扫频源光学相干层析成像系统的波长可调谐垂直腔面发射激光器
- 专利标题（英）：WAVELENGTH-TUNABLE VERTICAL CAVITY SURFACE EMITTING LASER FOR SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY SYSTEM
- 申请号：CN201810386712.X 申请日：2014-07-01
- 公开(公告)号：CN108683079A 公开(公告)日：2018-10-19
- 发明人： T·牧野 , T·李 , D·尤
- 申请人： 英菲尼斯有限责任公司
- 申请人地址： 美国加利福尼亚州
- 专利权人： 英菲尼斯有限责任公司
- 当前专利权人： 英菲尼斯有限责任公司
- 当前专利权人地址： 美国加利福尼亚州
- 代理机构： 广州嘉权专利商标事务所有限公司
- 代理人： 郑勇
- 优先权： 61/842,389 20130703 US
- 主分类号： H01S5/183
- IPC分类号： H01S5/183 ; H01S5/34 ; G01N21/47 ; G01B9/02 ; H01S5/343
A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) with the use of micro-electromechanical system (MEMS) technology is provided as a swept source for Optical Coherence Tomography (OCT). The wavelength-tunable VCSEL comprises a bottom mirror of the VCSEL, an active region, and a MEMS tunable upper mirror movable by electrostatic deflections. The bottom mirror comprising a GaAs based distributed Bragg reflector (DBR) stack, and the active region comprising multiple stacks of GaAs based quantum dot (QD) layers, are epitaxially grown on a GaAs substrate. The MEMS tunable upper mirror includes a membrane part supported by suspension beams, and an upper mirror comprising a dielectric DBR stack. The MEMS tunable quantum dots VCSEL can cover an operating wavelength range of more than 100 nm, preferably with a center wavelength between 250 and 1950 nm, and the sweeping rate can be from a few kHz to hundreds of kHz, and up to a few MHz.