基本信息:
- 专利标题： RWG型DFB激光器脊条上图形窗口的实现工艺
- 专利标题（英）：Realization process of graphic window on RWG-type DFB laser ridge stripe
- 申请号：CN201810670020.8 申请日：2018-06-26
- 公开(公告)号：CN108649428A 公开(公告)日：2018-10-12
- 发明人： 曲迪 , 白国人 , 陈墨 , 梁娟 , 宋学颍
- 申请人： 华慧芯科技(天津)有限公司
- 申请人地址： 天津市滨海新区生态城中天大道1620号生态科技园启发大厦12层101
- 专利权人： 华慧芯科技(天津)有限公司
- 当前专利权人： 天津华慧芯科技集团有限公司,华慧高芯科技(深圳)有限公司
- 当前专利权人地址： 天津市滨海新区生态城中天大道1620号生态科技园启发大厦12层101
- 代理机构： 天津市鼎和专利商标代理有限公司
- 代理人： 蒙建军
- 主分类号： H01S5/12
- IPC分类号： H01S5/12 ; H01S5/22 ; G03F7/00
The invention discloses a realization process of a graphic window on the ridge strip of an RWG-type DFB laser. The process belongs to the field of micro-electronic technology and optical fiber communication, and is characterized by at least comprising the following steps: step 1: cleaning a substrate; step 2: spin-coating the surface of substrate with double-layer photoresist, and transferring thepattern on the photoetching plate to the surface of the substrate by exposure and film development; step 3: using the photoresist as a mask to etch a ridge waveguide structure; step 4: using the method of atomic layer deposition to deposit a thin film as the insulating layer; step 5: removing the photoresist along with the film above the ridge waveguide through the Lift-off stripping process to achieve the graphics window on the ridge strip. By adopting the above technical scheme, the process flow is simplified while the process effect is ensured, and the manufacturing cost can be reduced.
公开/授权文献:
- CN108649428B RWG型DFB激光器脊条上图形窗口的实现工艺 公开/授权日：2020-10-30