
基本信息:
- 专利标题: 具有球冠结构的4H-SiC紫外光电探测器及制备方法
- 专利标题(英):4H-SiC ultraviolet photoelectric detector with spherical crown structure, and preparation method
- 申请号:CN201810402996.7 申请日:2018-04-28
- 公开(公告)号:CN108400197A 公开(公告)日:2018-08-14
- 发明人: 洪荣墩 , 吴俊慷 , 吴正云
- 申请人: 厦门大学
- 申请人地址: 福建省厦门市思明南路422号
- 专利权人: 厦门大学
- 当前专利权人: 厦门大学
- 当前专利权人地址: 福建省厦门市思明南路422号
- 代理机构: 厦门南强之路专利事务所
- 代理人: 马应森
- 主分类号: H01L31/105
- IPC分类号: H01L31/105 ; H01L31/0312 ; H01L31/18
Disclosed are a 4H-SiC ultraviolet photoelectric detector with a spherical crown structure, and a preparation method. The ultraviolet photoelectric detector adopts a p-i-n structure; an N type bufferlayer and an i type absorption layer are grown on a highly-doped four-degree-off-axis double parabolic N+ type 4H-SiC substrate in sequence; an arc-shaped inclined table surface is formed on the i type absorption layer to form a spherical crown-shaped i type absorption layer surface; by adopting an injection and high-temperature annealing activation process, a P+ layer is formed on the upper surface of the spherical crown-shaped i type absorption layer; next, through a thermal oxidization method, a silicon dioxide passivation layer is grown on the surface of the P+ layer; through a photoetching process, an ICP etching process and a stripping process, a P type annular electrode window is etched in the silicon dioxide passivation layer of the P+ layer, and a P type electrode is formed by adopting a magnetron sputtering process; and the highly-doped four-degree-off-axis double parabolic N+ type 4H-SiC substrate on the back surface is etched, and an N type electrode is formed by adopting amagnetron sputtering process, so as to obtain the 4H-SiC ultraviolet photoelectric detector with the spherical crown structure.
公开/授权文献:
- CN108400197B 具有球冠结构的4H-SiC紫外光电探测器及制备方法 公开/授权日:2020-03-17
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L31/00 | 对红外辐射、光、较短波长的电磁辐射,或微粒辐射敏感的,并且专门适用于把这样的辐射能转换为电能的,或者专门适用于通过这样的辐射进行电能控制的半导体器件;专门适用于制造或处理这些半导体器件或其部件的方法或设备;其零部件 |
--------H01L31/02 | .零部件 |
----------H01L31/10 | ..特点在于至少有一个电位跃变势垒或表面势垒的,例如光敏晶体管 |
------------H01L31/101 | ...对红外、可见或紫外辐射敏感的器件 |
--------------H01L31/102 | ....仅以一个势垒或面垒为特征的 |
----------------H01L31/105 | .....为PIN型势垒的 |