基本信息:
- 专利标题： 掩膜板及其制造方法、对压电喷头进行镀电极的方法
- 专利标题（英）：Mask plate, manufacturing method of mask plate and method for plating electrodes on piezoelectric spray heads
- 申请号：CN201711393282.6 申请日：2017-12-21
- 公开(公告)号：CN108130511A 公开(公告)日：2018-06-08
- 发明人： 王贝贝 , 胡兆斌 , 向永嘉
- 申请人： 苏州英捷飞微机电有限公司
- 申请人地址： 江苏省苏州市吴中区木渎镇枫华商业广场2幢1246室
- 专利权人： 苏州英捷飞微机电有限公司
- 当前专利权人： 苏州英加特喷印科技有限公司
- 当前专利权人地址： 江苏省苏州市吴中区木渎镇枫华商业广场2幢1246室
- 代理机构： 南京利丰知识产权代理事务所
- 代理人： 王锋
- 主分类号： C23C14/04
- IPC分类号： C23C14/04 ; C23C14/24
The invention discloses a mask plate, a manufacturing method of the mask plate and a method for plating electrodes on piezoelectric spray heads. Multiple through holes are formed in the mask plate ina penetrating manner in the direction of the thickness of the mask plate. When the mask plate is used, the mask plate is located on the tops of spray nozzles arranged in an array manner, the through holes correspond to gaps between the spray nozzles, and the thickness of the mask plate gradually decreases in the first direction away from an evaporation source and perpendicular to the surfaces, tobe plated with the electrodes, of the spray nozzles, so that the lengths of the electrodes plated on the side walls of the spray nozzles through the through holes in the mask plate by the evaporationsource are consistent.
公开/授权文献:
- CN108130511B 掩膜板及其制造方法、对压电喷头进行镀电极的方法 公开/授权日：2024-04-30