
基本信息:
- 专利标题: 半导体装置用接合线
- 专利标题(英):BONDING WIRE FOR SEMICONDUCTOR DEVICE
- 申请号:CN201711344468.2 申请日:2016-05-19
- 公开(公告)号:CN107962313A 公开(公告)日:2018-04-27
- 发明人: 山田隆 , 小田大造 , 榛原照男 , 大石良 , 斋藤和之 , 宇野智裕
- 申请人: 日铁住金新材料股份有限公司 , 新日铁住金高新材料株式会社
- 申请人地址: 日本埼玉县
- 专利权人: 日铁住金新材料股份有限公司,新日铁住金高新材料株式会社
- 当前专利权人: 日铁住金新材料股份有限公司,日铁化学材料株式会社
- 当前专利权人地址: 日本埼玉县
- 代理机构: 北京市中咨律师事务所
- 代理人: 刘航; 段承恩
- 优先权: 2015-120509 2015.06.15 JP
- 主分类号: B23K35/02
- IPC分类号: B23K35/02 ; B23K35/30 ; C22C5/04 ; C22C9/00 ; C22C9/04 ; C22C9/06 ; H01L23/00
A bonding wire for a semiconductor device of the present invention has a Cu alloy core material and a Pd coating layer formed on the surface of the bonding wire, and can simultaneously realize improved reliability for the bonding of the ball joint portion at a high temperature and the proof stress ratio (=maximum proof stress/0.2% proof stress) of 1.1-1.6. By incorporating elements that impart bonding reliability in a high temperature environment, the bonding reliability of the ball joint portion at a high temperature is increased. Furthermore, in a result of measuring crystallization orientation on the core material cross section perpendicular to the wire axis of the bonding wire, the orientation ratio of the wire in the length direction with respect to the <100> crystallization orientation within the angular difference range of less than 15 degrees in the wire length direction is set to be 30% or more, and the average grain size of the core material cross section perpendicular to thewire axis of the bonding wire is set to be 0.9-1.5 [mu]m. Further, the proof stress ratio is set to be 1.6 or less.
公开/授权文献:
- CN107962313B 半导体装置用接合线 公开/授权日:2024-03-08
IPC结构图谱:
B | 作业;运输 |
--B23 | 机床;不包含在其他类目中的金属加工 |
----B23K | 钎焊或脱焊;焊接;用钎焊或焊接方法包覆或镀敷;局部加热切割,如火焰切割;用激光束加工 |
------B23K35/00 | 用于钎焊、焊接或切割的焊条、电极、材料或介质 |
--------B23K35/02 | .其机械特征,如形状 |