基本信息:
- 专利标题： 用于液体颗粒预先判定的方法和系统
- 专利标题（英）：Methods And Systems For Liquid Particle Prequalification
- 申请号：CN201710791203.0 申请日：2017-09-05
- 公开(公告)号：CN107838116A 公开(公告)日：2018-03-27
- 发明人： 桑克沙·博雅 , 马赫什·阿尔果德 , 奈尔施·奇尔曼奥·巴古 , 荷曼撒·拉朱 , 拉万德·帕蒂尔
- 申请人： 应用材料公司
- 申请人地址： 美国加利福尼亚州
- 专利权人： 应用材料公司
- 当前专利权人： 应用材料公司
- 当前专利权人地址： 美国加利福尼亚州
- 代理机构： 北京律诚同业知识产权代理有限公司
- 代理人： 徐金国; 赵静
- 优先权： 15/269,324 2016.09.19 US
- 主分类号： B08B3/12
- IPC分类号： B08B3/12 ; G01N15/02 ; G01N15/06
Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems maybe used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side of the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculatewater from the cleaning bath and another liquid pump is configured to remove a small amount of the cleaning bath to sample particulates.