![一种180°固晶机的邦头结构](/CN/2017/1/262/images/201711313999.jpg)
基本信息:
- 专利标题: 一种180°固晶机的邦头结构
- 专利标题(英):Bond head structure of 180-degree die bonder
- 申请号:CN201711313999.5 申请日:2017-12-12
- 公开(公告)号:CN107808841A 公开(公告)日:2018-03-16
- 发明人: 徐大林 , 宋宝
- 申请人: 深圳市佳思特光电设备有限公司
- 申请人地址: 广东省深圳市龙岗区平湖街道鹅公岭社区凤门园工业园E1栋一~三层
- 专利权人: 深圳市佳思特光电设备有限公司
- 当前专利权人: 深圳市佳思特光电设备有限公司
- 当前专利权人地址: 广东省深圳市龙岗区平湖街道鹅公岭社区凤门园工业园E1栋一~三层
- 代理机构: 广州粤高专利商标代理有限公司
- 代理人: 罗晓林; 杨桂洋
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L33/48
A bond head structure of a 180-degree die bonder comprises a driving device and a swing arm mechanism, wherein the driving device comprises a Z-axis motor and a rotating motor; the Z-axis motor is arranged on a Z-axis installing seat; a motor shaft of the Z-axis motor is connected with an eccentric shaft through a bearing; the eccentric shaft is connected with a connecting rod; the connecting rodis connected with a Z-axis connecting block; a motor shaft of the rotating motor is connected with a rotating shaft; the rotating shaft is provided with a swing arm guide rail; the swing arm guide rail is provided with a swing arm connecting block in a clamping way; the swing arm connecting block is rotationally connected with the Z-axis connecting block through a fixed shaft and is locked througha nut; the swing arm mechanism is fixedly connected with the swing arm connecting block; the rotating motor drives the swing arm mechanism to swing within a 180-degree range. According to the bond head structure disclosed by the invention, a flexible swing arm structure is adopted, the stress of a swing arm can be regulated, and the flexibility of the swing arm can be increased; due to the designof the bond head structure of the 180-degree die bond, the die bonding speed can be increased while the layout of effectively reducing the volume of a bond head zone and optimizing all components iscarried out.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/67 | .专门适用于在制造或处理过程中处理半导体或电固体器件的装置;专门适合于在半导体或电固体器件或部件的制造或处理过程中处理晶片的装置 |