The invention discloses an imaging device, an imaging method and an imaging system, and belongs to the technical field of acquisition of sample image data and imaging. The imaging device comprises a charged particle source, a convergence system, a scanning and controlling system, a detecting module and a spectrum analysis module, wherein the spectrum analysis module is placed below the detecting module; the detecting module comprises a plurality of pixilated detector units; and a hole is formed in the detecting module. The imaging device comprises the detecting module with the hole and the spectrum analysis module. A diffraction pattern is obtained by the detecting module with the hole, the spectrum analysis module carries out spectrum analysis on charged particle beams which penetrates through the opening, primary scanning is realized, and meanwhile, the diffraction pattern and spectrum signals are obtained. The imaging method is based on a hollow stacking imaging method, the diffraction pattern obtained by the detecting module with the hole is imaged, and the imaging effect is good.