![芯片级旋转调制式MEMS硅微机械陀螺](/CN/2017/1/192/images/201710961356.jpg)
基本信息:
- 专利标题: 芯片级旋转调制式MEMS硅微机械陀螺
- 专利标题(英):Chip-level rotating-modulation MEMS (micro-electromechanical systems) silicon micromechanical gyro
- 申请号:CN201710961356.5 申请日:2017-10-17
- 公开(公告)号:CN107796383A 公开(公告)日:2018-03-13
- 发明人: 苑伟政 , 申强 , 杨瑾 , 周金秋 , 谢建兵 , 常洪龙
- 申请人: 西北工业大学 , 西北工业大学深圳研究院
- 申请人地址: 陕西省西安市友谊西路127号
- 专利权人: 西北工业大学,西北工业大学深圳研究院
- 当前专利权人: 西北工业大学
- 当前专利权人地址: 710072 陕西省西安市友谊西路127号
- 代理机构: 西北工业大学专利中心
- 代理人: 吕湘连
- 主分类号: G01C19/5656
- IPC分类号: G01C19/5656
The invention discloses a chip-level rotating-modulation MEMS (micro-electromechanical systems) silicon micromechanical gyro and belongs to the field of inertial technologies and MEMS. The chip-levelrotating-modulation MEMS silicon micromechanical gyro comprises a base to support a rotary platform and maintain its rotation and an SOI (silicon on insulator) wafer; the base is composed of glass sheet 1 and first metal electrode 2 and second metal electrode 3 arranged on the upper surface of the glass sheet by sputtering; a micromechanical gyro 4, a wire unit 5, a drive electrode 6, a driving detection electrode 7, a first sensitive detection electrode 8 and a second sensitive detection electrode 9 are formed on a device layer of the SOI silicon wafer; a rotary modulation platform is formedon a base layer. The micromechanical gyro and its rotary modulation platform are integrally formed on different layers of the same SOI wafer, the size of the rotary modulating gyro is greatly decreased, and integrity is improved; compared with original like gyros, the chip-level rotating-modulation MEMS silicon micromechanical gyro is formed into the chip-level rotary modulating micromechanical gyro with the size decreased by about 2 magnitudes.
公开/授权文献:
- CN107796383B 芯片级旋转调制式MEMS硅微机械陀螺 公开/授权日:2021-03-23
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01C | 测量距离、水准或者方位;勘测;导航;陀螺仪;摄影测量学或视频测量学 |
------G01C19/00 | 陀螺仪;带有振动部件的转动敏感装置;不带有运动部件的转动敏感装置 |
--------G01C19/02 | .旋转式陀螺仪 |
----------G01C19/5642 | ..使用振动条或振动梁 |
------------G01C19/5656 | ...包含微机械结构的装置 |