![一种具有双层薄n基区的碳化硅光触发晶闸管及制作方法](/CN/2017/1/142/images/201710711313.jpg)
基本信息:
- 专利标题: 一种具有双层薄n基区的碳化硅光触发晶闸管及制作方法
- 专利标题(英):Silicon carbide light trigger thyristor having double layer thin n-base region and manufacturing method
- 申请号:CN201710711313.1 申请日:2017-08-18
- 公开(公告)号:CN107579115A 公开(公告)日:2018-01-12
- 发明人: 蒲红斌 , 王曦 , 刘青 , 李佳琪 , 杜利祥 , 王雅芳
- 申请人: 西安理工大学
- 申请人地址: 陕西省西安市金花南路5号
- 专利权人: 西安理工大学
- 当前专利权人: 西安理工大学
- 当前专利权人地址: 陕西省西安市金花南路5号
- 代理机构: 西安弘理专利事务所
- 代理人: 王奇
- 主分类号: H01L29/745
- IPC分类号: H01L29/745 ; H01L21/332
The invention discloses a silicon carbide light trigger thyristor having a double layer thin n-base region. The silicon carbide light trigger thyristor comprises a SiC substrate, wherein the SiC substrate is sequentially provided with a first epitaxial layer, a second epitaxial layer, a third epitaxial layer, a fourth epitaxial layer, a fifth epitaxial layer and a sixth epitaxial layer, the sixthepitaxial layer has multiple bosses, an upper portion of the third epitaxial layer is embedded with a junction terminal, the junction terminal is arranged outside tail ends of the fourth epitaxial layer and the fifth epitaxial layer, an insulation medium film is further comprised, side walls of each boss, the surface of the fifth epitaxial layer among the bosses and side walls and the surface of ajunction terminal mesa are covered by the insulation medium film, an upper end surface of each boss of the sixth epitaxial layer is covered by an anode, and a lower end surface of the SiC substrate is covered by a cathode. The invention further discloses a manufacturing method of the silicon carbide light trigger thyristor having the double layer thin n-base region. The silicon carbide light trigger thyristor having the double layer thin n-base region is advantaged in that the structure is special, device performance is excellent. The manufacturing method is convenient for enforcement.
公开/授权文献:
- CN107579115B 一种具有双层薄n基区的碳化硅光触发晶闸管及制作方法 公开/授权日:2020-05-22
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/72 | ....晶体管型器件,如连续响应于所施加的控制信号的 |
----------------H01L29/744 | .....栅极关断型器件 |
------------------H01L29/745 | ......由场效应关断的 |