![切断装置及切断方法](/CN/2016/8/5/images/201680025726.jpg)
基本信息:
- 专利标题: 切断装置及切断方法
- 申请号:CN201680025726.8 申请日:2016-06-28
- 公开(公告)号:CN107530859B 公开(公告)日:2019-07-12
- 发明人: 山本雅之 , 深井元树 , 石桥干司
- 申请人: 东和株式会社
- 申请人地址: 日本京都市
- 专利权人: 东和株式会社
- 当前专利权人: 东和株式会社
- 当前专利权人地址: 日本京都市
- 代理机构: 北京德琦知识产权代理有限公司
- 代理人: 齐葵; 周艳玲
- 优先权: 2015-142588 2015.07.17 JP
- 国际申请: PCT/JP2016/003101 2016.06.28
- 国际公布: WO2017/013837 JA 2017.01.26
- 进入国家日期: 2017-11-03
- 主分类号: B24B27/06
- IPC分类号: B24B27/06 ; B24B45/00 ; B24D5/16 ; B26D1/14 ; B28D1/24 ; H01L21/301
A cutting device is provided with a first flange and a second flange secured to a rotary shaft in such a state as to sandwich a rotary blade. The first flange is provided with an annular holding part in close contact at the outer-peripheral portion thereof with a first surface of the rotary blade, and an annular first recess. The second flange is provided with an annular holding part in close contact at the outer-peripheral portion thereof with a second surface of the rotary blade, and an annular second recess. The first recess and the second recess are disposed facing each other with the rotary blade therebetween. The distance from the first surface to the inner bottom surface of the first recess and the distance from the second surface to the inner bottom surface of the second recess are set so as to be greater than the maximum size of abrasive grains of the rotary blade, less than the maximum amount of deformation within the permissible range of deformation of the rotary blade, and equal to each other. When the rotary blade deforms, the abrasive grains come into contact with the first recess and second recess.
公开/授权文献:
- CN107530859A 切断装置及切断方法 公开/授权日:2018-01-02