![一种具有可控集电极槽的SOI LIGBT](/CN/2017/1/153/images/201710768209.jpg)
基本信息:
- 专利标题: 一种具有可控集电极槽的SOI LIGBT
- 专利标题(英):SOI LIGBT with controllable collector trough
- 申请号:CN201710768209.6 申请日:2017-08-31
- 公开(公告)号:CN107342321A 公开(公告)日:2017-11-10
- 发明人: 罗小蓉 , 魏杰 , 黄琳华 , 邓高强 , 赵哲言 , 刘庆 , 曹厚华 , 孙燕 , 莫日华 , 曾莉尧
- 申请人: 电子科技大学 , 电子科技大学广东电子信息工程研究院
- 申请人地址: 四川省成都市高新西区西源大道2006号
- 专利权人: 电子科技大学,电子科技大学广东电子信息工程研究院
- 当前专利权人: 电子科技大学,电子科技大学广东电子信息工程研究院
- 当前专利权人地址: 四川省成都市高新西区西源大道2006号
- 代理机构: 成都点睛专利代理事务所
- 代理人: 孙一峰
- 主分类号: H01L29/739
- IPC分类号: H01L29/739 ; H01L29/08
The invention belongs to the technical field of power semiconductors, and specifically relates to an SOI LIGBT with a controllable collector trough. Compared with a conventional structure, the LIGBT mainly introduces a controllable collector trough structure to a collector end and introduces a plurality of trough grid structures to the collector. During the forwarding conduction, the bias voltage of a trough collector relative to the collector is negative, and a side wall of the collector trough forms a high-density P-type reflection layer so as to increase the hole implantation. The segmented trough grid structures serve as the blocking layers of hole extraction. Therefore, the increase of the hole/electron concentration in a drift region facilitates the obtaining of a lower forwarding conduction voltage drop. Meanwhile, because an N+ collector region is located on the upper surface of a P+ collector region and does not make contact with an N-type drift region, a new device does not has a voltage turning-back effect. The beneficial effects of the invention are that the LIGBT, compared with a conventional short-circuit anode-LIGBT structure, is higher in switching-off speed and lower in forwarding conduction voltage drop, and does not have the voltage turning-back effect.
公开/授权文献:
- CN107342321B 一种具有可控集电极槽的SOI LIGBT 公开/授权日:2023-03-31
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/72 | ....晶体管型器件,如连续响应于所施加的控制信号的 |
----------------H01L29/739 | .....受场效应控制的 |