![具硅穿孔连续型态的晶圆级晶片尺寸封装构造及制造方法](/CN/2016/1/192/images/201610962355.jpg)
基本信息:
- 专利标题: 具硅穿孔连续型态的晶圆级晶片尺寸封装构造及制造方法
- 专利标题(英):Wafer level chip scale package (WLCSP) structure with through-silicon via continuous state and manufacturing method thereof
- 申请号:CN201610962355.8 申请日:2016-10-28
- 公开(公告)号:CN107154387A 公开(公告)日:2017-09-12
- 发明人: 方立志 , 张家彰 , 徐宏欣 , 张文雄 , 鍾基伟 , 连加雯
- 申请人: 力成科技股份有限公司
- 申请人地址: 中国台湾新竹县湖口乡新竹工业区大同路26号
- 专利权人: 力成科技股份有限公司
- 当前专利权人: 力成科技股份有限公司
- 当前专利权人地址: 中国台湾新竹县湖口乡新竹工业区大同路26号
- 代理机构: 北京同立钧成知识产权代理有限公司
- 代理人: 马雯雯; 臧建明
- 优先权: 105106770 20160304 TW
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L23/498 ; H01L21/56
The invention discloses a wafer level chip scale package (WLCSP) structure with a through-silicon via continuous state and a manufacturing method thereof. The WLCSP structure mainly comprises a device chip, a carrier chip laminated on the device chip, a protective cover, and a through-silicon via structure. A metal interlinked parallel pad combination is embedded in the device chip. An offset pad is arranged on the device chip and is connected to the metal interlinked parallel pad combination. A partition conductor lug is arranged on the offset pad. A partition adhesive layer is formed on the device chip and covers the partition conductor lug. The protective cover is pressed on the partition adhesive layer. The through-silicon via structure comprises a through hole and a porous metal layer. The through hole is slightly-eccentrically aligned to the offset pad and penetrates the carrier chip and the device chip continuously. The porous metal layer is formed in the through hole and is connected to the offset pad. The through hole is non-centrally aligned to the partition conductor lug. A protective layer is formed on the carrier chip and covers the through hole. The conductor lug is partitioned by the offset pad so as to ensure the continuous state of the through-silicon via structure.
公开/授权文献:
- CN107154387B 具硅穿孔连续型态的晶圆级晶片尺寸封装构造及制造方法 公开/授权日:2019-08-06
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |
--------H01L23/02 | .容器;封接 |
----------H01L23/31 | ..按配置特点进行区分的 |