
基本信息:
- 专利标题: 半导体器件及其制造方法
- 专利标题(英):Semiconductor device and method of manufacturing same
- 申请号:CN201710060910.2 申请日:2017-01-25
- 公开(公告)号:CN107046057A 公开(公告)日:2017-08-15
- 发明人: 中西翔
- 申请人: 瑞萨电子株式会社
- 申请人地址: 日本东京
- 专利权人: 瑞萨电子株式会社
- 当前专利权人: 瑞萨电子株式会社
- 当前专利权人地址: 日本东京
- 代理机构: 中原信达知识产权代理有限责任公司
- 代理人: 李兰; 孙志湧
- 优先权: 2016-020383 20160205 JP
- 主分类号: H01L29/40
- IPC分类号: H01L29/40 ; H01L27/082 ; H01L21/8222
The invention relates to a semiconductor device and a method of manufacturing same. To provide a highly reliable semiconductor device having both an improved breakdown voltage and a reduced withstand voltage leakage current. An intermediate resistive field plate is comprised of a first intermediate resistive field plate coupled, at one end thereof, to an inner-circumferential-side resistive field plate and, at the other end, to an outer-circumferential-side resistive field plate and a plurality of second intermediate resistive field plates. The first intermediate resistive field plate has a planar pattern that is equipped with a plurality of first portions separated from each other in a first direction connecting the inner-circumferential resistive field plate to the outer-circumferential-side resistive field plate and linearly extending in a second direction orthogonal to the first direction, and repeats reciprocation along the second direction. The second intermediate resistive field plates are each connected with a first end portion on one side of the first portions and extend with a curvature.
公开/授权文献:
- CN107046057B 半导体器件及其制造方法 公开/授权日:2021-08-24