The invention relates to the technical field of MEMS device measurement and particularly relates to a three-dimensional micro-nano-noncontact trigger probe and an MEMS device measurement device. The probe comprises a visualization module and a measurement module, wherein the visualization module comprises a white LED, a first collimating lens, a non-polarized beam splitter prism, a polarized beam splitter prism, a second collimating lens, a focusing lens, a polarizing film, a field lens and a CCD camera; and the measurement module comprises a laser device, a grating, a polarized beam splitter prism, a quarter-wave plate, a cylindrical lens, a photoelectric integrated circuit and a four-quadrant sensor. The probe is based on a deep ultraviolet light source, an astigmatic principle and a laser reflected energy method, the resolution of the probe in three-axis directions reaches 1nm, the trigger repeatability is smaller than 30nm to meet the requirements of MEMS device measurement; and the probe is especially good at measurement of a device with a fine edge feature. Meanwhile, the probe has the advantages of being small in volume, high in accuracy, simple in debugging, convenient to assemble and low in cost.