![一种陶瓷芯片的封装工艺及其封装结构](/CN/2016/1/227/images/201611137889.jpg)
基本信息:
- 专利标题: 一种陶瓷芯片的封装工艺及其封装结构
- 专利标题(英):Packaging technology and packaging structure of ceramic chip
- 申请号:CN201611137889.3 申请日:2016-12-12
- 公开(公告)号:CN106653622A 公开(公告)日:2017-05-10
- 发明人: 刘兵 , 张奥涵 , 刘勇
- 申请人: 南京诺邦新材料有限公司
- 申请人地址: 江苏省南京市栖霞区红枫科技园C5楼
- 专利权人: 南京诺邦新材料有限公司
- 当前专利权人: 南京诺邦新材料有限公司
- 当前专利权人地址: 江苏省南京市栖霞区红枫科技园C5楼
- 代理机构: 南京利丰知识产权代理事务所
- 代理人: 任立
- 主分类号: H01L21/56
- IPC分类号: H01L21/56 ; H01L23/31 ; H01L23/29
The invention provides a packaging technology of a ceramic chip. The packaging technology comprises the following steps of (I) dispensing and film-forming, before chip assembly, coating the edge of one side, which needs to be packaged with a cover plate, of a ceramic carrier with a liquid-like dual-curable sealant through a glue dispenser, and curing and setting the dual-curable sealant through UV light irradiation to form a structural film on the ceramic carrier; (2) chip assembly, namely carrying out chip assembly on the ceramic carrier; and (3) cured sealing, after chip assembly is completed, bonding the cover plate matched with the ceramic carrier in size and the ceramic carrier through heating the structural film and then carrying out cured sealing. The packaging structure of the ceramic chip has the practical advantages of high bonding strength, good surface wettability, high air-tightness and the like, the roll-to-roll automatic dispensing process can be achieved and the production efficiency is obviously improved.
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/50 | ...应用H01L21/06至H01L21/326中的任一小组都不包含的方法或设备组装半导体器件的 |
--------------H01L21/56 | ....封装,例如密封层、涂层 |