The invention belongs to the technical field of heating thermal insulation materials used in semiconductor fields, and particularly relates to an intelligent temperature-controlled heating thermal insulation material and a temperature control system thereof. The intelligent temperature-controlled heating thermal insulation material comprises a shape memory alloy layer, a heat-insulating composite material layer and an insulating outer sleeve, wherein a temperature sensor is arranged between the memory alloy layer and the heat-insulating composite material layer; under the control of the temperature control system, the sensor is used for transmitting a detected temperature to a controller; the controller is used for comparing the detected temperature with a set temperature, so that a thermoelectric refrigerating unit carries out heating or refrigerating on the intelligent temperature-controlled heating thermal insulation material by regulating the direction and magnitude of current of a drive circuit, and therefore, temperature control on a process pipeline is achieved. According to the intelligent temperature-controlled heating thermal insulation material, a heating belt and a thermal insulation sleeve are manufactured into an integral structure, so that the utilization rate of manpower and material resources can be increased, a reaction process further is normally performed, and quality of a film product is guaranteed; and the intelligent temperature-controlled heating thermal insulation material is simple and reasonable in structure and is easily popularized in the technical field of semiconductor film deposition application and preparation.