
基本信息:
- 专利标题: 一种精馏尾气回收系统
- 专利标题(英):Rectification tail gas recovery system
- 申请号:CN201510639584.1 申请日:2015-09-30
- 公开(公告)号:CN106554021A 公开(公告)日:2017-04-05
- 发明人: 蒋鹏 , 王玉丽 , 邹飞 , 刘长圣 , 青培松 , 余洋 , 颉刚刚
- 申请人: 新特能源股份有限公司
- 申请人地址: 新疆维吾尔自治区乌鲁木齐国家级高新技术产业开发区(新市区)甘泉堡高新技术产业园
- 专利权人: 新特能源股份有限公司
- 当前专利权人: 新特能源股份有限公司
- 当前专利权人地址: 新疆维吾尔自治区乌鲁木齐国家级高新技术产业开发区(新市区)甘泉堡高新技术产业园
- 代理机构: 北京天昊联合知识产权代理有限公司
- 代理人: 罗建民; 邓伯英
- 主分类号: C01B33/107
- IPC分类号: C01B33/107
The invention provides a rectification tail gas recovery system. The rectification tail gas recovery system comprises a chlorosilane gas carrying phosphorus and boron impurities, the recovery system comprises a comproportionation tower and an impurity adsorption device, rectification tail gas entering the lower feeding opening of the comproportionation tower is leached by a silicon tetrachloride material entering the upper feeding opening of the comproportionation tower and undergoes a comproportionation reaction in the comproportionation tower, trichlorosilane generated by the reaction and phosphorus and boron impurities carried by the trichlorosilane are output from the gas phase outlet of the comproportionation tower as preliminarily purified gas, residual substances in the rectification tail gas and the unreacted silicon tetrachloride material are discharged from the liquid outlet of the comproportionation tower, and the impurity adsorption device is used for carrying out adsorption treatment on the preliminarily purified gas to remove the phosphorus and boron impurities. The recovery system well recovers chlorosilane in the rectification tail gas, thereby saving the production cost.
公开/授权文献:
- CN106554021B 一种精馏尾气回收系统 公开/授权日:2019-06-25