基本信息:
- 专利标题： 一种检测三氟化硼原料气中氟化氢含量的方法及装置
- 专利标题（英）：Method and apparatus for detecting hydrogen fluoride content in boron trifluoride raw material gas
- 申请号：CN201610569041.1 申请日：2016-07-19
- 公开(公告)号：CN106248520A 公开(公告)日：2016-12-21
- 发明人： 金向华 , 宗立冬 , 夏致远 , 孙猛 , 陈琦峰 , 周珽 , 曹文权 , 许军州 , 唐璐
- 申请人： 苏州金宏气体股份有限公司
- 申请人地址： 江苏省苏州市相城区黄埭镇潘阳工业园安民路6号
- 专利权人： 苏州金宏气体股份有限公司
- 当前专利权人： 苏州金宏气体股份有限公司
- 当前专利权人地址： 江苏省苏州市相城区黄埭镇潘阳工业园安民路6号
- 代理机构： 苏州翔远专利代理事务所
- 代理人： 陆金星
- 主分类号： G01N5/02
- IPC分类号： G01N5/02
The invention discloses a method for detecting the hydrogen fluoride content in boron trifluoride raw material gas. The method comprises that boron trifluoride raw material gas is divided into two equal parts according to the mass, wherein the two parts are respectively named first boron trifluoride raw material gas and second boron trifluoride raw material gas; and the first boron trifluoride raw material gas and the second boron trifluoride raw material gas respectively enter a first testing process and a second testing process. According to the present invention, the test results prove that the hydrogen fluoride content in the boron trifluoride tail gas during the boron trifluoride complex production process can be accurately measured with the method of the present invention, the good judgment performance is provided, and the remarkable effect is obtained.
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
| ------G01N5/00 | 用称量的方法分析材料，例如称量从气体或液体分离出的微粒 |
| --------G01N5/02 | .利用物质吸收或吸附某些组分并测定吸附剂的重量变化，例如测定含水量 |