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基本信息:
- 专利标题: 一种全自动植球装置及其应用
- 申请号:CN201610545950.1 申请日:2016-07-12
- 公开(公告)号:CN106112182B 公开(公告)日:2018-09-04
- 发明人: 刘劲松 , 郭俭 , 张金志 , 张应伍 , 谢旭波
- 申请人: 上海微松工业自动化有限公司
- 申请人地址: 上海市闵行区新骏环路188号15-102
- 专利权人: 上海微松工业自动化有限公司
- 当前专利权人: 上海微松工业自动化有限公司
- 当前专利权人地址: 上海市闵行区新骏环路188号15-102
- 代理机构: 上海科盛知识产权代理有限公司
- 代理人: 陈亮
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; B23K101/40
The invention relates to a full-automatic ball mounting device and an application thereof. The device comprises a ball supplying mechanism, a ball mounting net plate (5) and a six-axis manipulator (7); the ball supplying mechanism comprises a ball supplying box (4), a ball supplying pipe (1), a ball supplying air cylinder (2) and a linear module (8), wherein the ball supplying box (4) is erected on the linear module (8) and communicates with the ball supplying pipe (1); the ball supplying air cylinder (2) opens and closes so that solder balls in the ball supplying box (4) can pass through the ball supplying pipe (1) and are uniformly distributed on one side of the ball mounting net plate (5); net holes corresponding to wafer PAD points and used for leaking the solder balls are processed in the ball mounting net plate (5), and the six-axis manipulator (7) is fixed on one side of the ball mounting net plate (5). Compared with the prior art, the device has the advantages that the efficiency is improved and the structure is simple.
公开/授权文献:
- CN106112182A 一种全自动植球装置及其应用 公开/授权日:2016-11-16
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/67 | .专门适用于在制造或处理过程中处理半导体或电固体器件的装置;专门适合于在半导体或电固体器件或部件的制造或处理过程中处理晶片的装置 |