
基本信息:
- 专利标题: 一种MEMS加速度传感器及制造方法
- 专利标题(英):MEMS acceleration sensor and manufacturing method thereof
- 申请号:CN201610312471.5 申请日:2016-05-12
- 公开(公告)号:CN106018879A 公开(公告)日:2016-10-12
- 发明人: 周志健 , 朱二辉 , 陈磊 , 杨力建 , 邝国华
- 申请人: 上海芯赫科技有限公司
- 申请人地址: 上海市嘉定区菊园新区环城路2222号1幢J237室
- 专利权人: 上海芯赫科技有限公司
- 当前专利权人: 广东合微集成电路技术有限公司
- 当前专利权人地址: 上海市嘉定区菊园新区环城路2222号1幢J237室
- 代理机构: 北京品源专利代理有限公司
- 代理人: 张海英; 林波
- 主分类号: G01P15/08
- IPC分类号: G01P15/08 ; B81B3/00 ; B81C1/00
The invention relates to the technical field of sensor processing, and especially relates to an MEMS acceleration sensor manufactured based on an MEMS processing technology. The MEMS acceleration sensor comprises a silicon substrate, a first predetermined cavity in the silicon substrate and a dangling silicon film above the first predetermined cavity, at least one second predetermined cavity and a dangling silicon film above the at least one second predetermined cavity, and a semiconductor doped resistor electrically connected with a conductive line. A first connector and a first release groove are formed above the first predetermined cavity. A limiting baffle, a second release groove and a second connector are formed above the second predetermined cavity. The first release groove and the second release groove are combined to form a dangling release structure. One end of the limiting baffle is connected with the silicon substrate, and the other end is freely dangling. One end of the first connector and one end of the second connector are connected with the silicon substrate, and the other end of the first connector and the other end of the second connector are connected with the dangling silicon film above the first predetermined cavity. Precise limiting overload protection is achieved through the limiting baffle in the dangling release structure. The MEMS acceleration sensor has a simple structure, and is easy to process.
公开/授权文献:
- CN106018879B 一种MEMS加速度传感器及制造方法 公开/授权日:2019-03-22
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01P | 线速度或角速度、加速度、减速度或冲击的测量;运动的存在、不存在或方向的指示 |
------G01P15/00 | 测量加速度;测量减速度;测量冲击即加速度的突变 |
--------G01P15/02 | .利用惯性力 |
----------G01P15/08 | ..用变换成电或磁量 |