基本信息:
- 专利标题： 涂敷膜除去装置
- 专利标题（英）：Coating film removal apparatus
- 申请号：CN201580005468.2 申请日：2015-01-23
- 公开(公告)号：CN105935005A 公开(公告)日：2016-09-07
- 发明人： 久保祐治 , 上林塁 , 福原智朗 , 伊藤裕猛
- 申请人： 凸版印刷株式会社
- 申请人地址： 日本东京都
- 专利权人： 凸版印刷株式会社
- 当前专利权人： 凸版印刷株式会社
- 当前专利权人地址： 日本东京都
- 代理机构： 永新专利商标代理有限公司
- 代理人： 高迪
- 优先权： 2014-010942 2014.01.24 JP; 2014-064042 2014.03.26 JP; 2014-085644 2014.04.17 JP; 2014-108130 2014.05.26 JP; 2014-109278 2014.05.27 JP
- 国际申请： PCT/JP2015/000306 2015.01.23
- 国际公布： WO2015/111414 JA 2015.07.30
- 进入国家日期： 2016-07-22
- 主分类号： H05B33/10
- IPC分类号： H05B33/10 ; G03F7/30 ; H01L51/50
Provided is a coating film removal apparatus which is capable of easily and accurately removing a part of a coating film that is applied over a substrate. A coating film removal apparatus according to the present invention is provided with: a coating film removal apparatus main body (31) that comprises a remover liquid supply means (5) which ejects a remover liquid (8) from a remover liquid supply port (5a) toward a coating film removal portion that is at a predetermined position of a coating film (2) on a substrate (1) and a remover liquid recovery means (6) for recovering the ejected remover liquid (8) through a remover liquid recovery port (6a); and a height adjustment device which adjusts the distance between the surface of the substrate (1) and a flat bottom surface of the coating film removal apparatus main body (31), said bottom surface being positioned between the remover liquid supply port (5a) and the remover liquid recovery port (6a).
IPC结构图谱:
| H | 电学 |
| --H05 | 其他类目不包含的电技术 |
| ----H05B | 电热；其他类目不包含的电照明 |
| ------H05B33/00 | 电致发光光源 |
| --------H05B33/10 | .专门适用于制造电致发光光源的设备或方法 |