基本信息:
- 专利标题： 声波装置
- 专利标题（英）：Acoustic wave device
- 申请号：CN201511008903.5 申请日：2015-12-29
- 公开(公告)号：CN105915195A 公开(公告)日：2016-08-31
- 发明人： 黑柳琢真
- 申请人： 太阳诱电株式会社
- 申请人地址： 日本东京都
- 专利权人： 太阳诱电株式会社
- 当前专利权人： 太阳诱电株式会社
- 当前专利权人地址： 日本东京都
- 代理机构： 北京三友知识产权代理有限公司
- 代理人： 吕俊刚
- 优先权： 2015-031084 2015.02.19 JP
- 主分类号： H03H9/25
- IPC分类号： H03H9/25 ; H03H9/02
An acoustic wave device includes: a support substrate; a piezoelectric substrate bonded to the support substrate; a first acoustic wave element formed on the piezoelectric substrate; a frame formed on the support substrate to surround the first acoustic wave element; and a substrate formed on the frame so that a cavity to which the first acoustic wave element is exposed is formed above the piezoelectric substrate, wherein a difference in linear expansion coefficient between the support substrate and the substrate in a first direction in a surface direction of the piezoelectric substrate is less than a difference in linear expansion coefficient between the support substrate and the piezoelectric substrate in the first direction, and the piezoelectric substrate remains in a region where the first acoustic wave element is formed and is removed in a region where the frame is formed.
公开/授权文献:
- CN105915195B 声波装置 公开/授权日：2018-12-04
IPC结构图谱:
| H | 电学 |
| --H03 | 基本电子电路 |
| ----H03H | 阻抗网络，例如谐振电路；谐振器 |
| ------H03H9/00 | 包括机电或电声元件的网络，如谐振电路 |
| --------H03H9/25 | .应用声表面波的谐振器的结构特点 |